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发明名称
Verbesserte Maskierungsverfahren bei der Halbleiterproduktion
摘要
申请公布号
DE69616004(D1)
申请公布日期
2001.11.22
申请号
DE1996616004
申请日期
1996.12.23
申请人
MOTOROLA, INC.
发明人
SHIRALAGI, KUMAR;TSUI, RAYMOND;GORONKIN, HERBERT
分类号
H01L21/316;H01L21/20;(IPC1-7):C23C8/02;H01L21/32;H01L21/263
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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