DISK-EDGE TYPE FIELD EMISSION DEVICE AND METHOD

摘要

a silicon substrate doped with a high concentration of impurity; a disk-edge type emitter electrode integrally formed with the substrate and having a round circumference; an emitter having silicide interposed in the boundary with the emitter electrode; an insulating layer formed on the substrate; and a gate electrode formed on the open insulating layer in the vicinity of the emitter electrode and the insulating layer.