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发明名称
摘要
申请公布号	JP2519721(B2)	申请公布日期	1996.07.31
申请号	JP19870117773	申请日期	1987.05.13
申请人	FUJITSU LTD	发明人	KASE MASATAKA
分类号	H01L21/265;H01L21/822;H01L27/04;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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