| 摘要 |
<p>The apparatus and the method of ablating matter from a substrate comprise a laser (10), an optical system (12, 14, 18) and a means (20) which is arranged within the beam path of the laser and by means of which a laser spot is formed which exhibits light and dark sections. By adjusting the means (20) prior to each laser pulse, the entire surface area of the laser spot is subjected to the same number of laser pulses.</p> |
