| 摘要 |
<p>An angular rate sensor includes a plurality of spaced apart vibrating beams, for example, four beams, defining a pair of outer beams and a pair of inner beams. Each outer beam is mechanically coupled to an inner beam by way of an interconnecting member. The outer beams are excited to cause them to vibrate in the plane of the beams and 180 degrees out of phase with the inner beams. In order to force the quadrature acceleration components to cancel out when geometric mismatches between the beams exist, the drive beams are driven separately at different amplitudes. By driving the beams at different amplitudes, the quadrature acceleration components of both beams can be matched, forcing such components to cancel to enable a single demodulator to be used for the Coriolis or angular rate signal.</p> |
