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摘要
申请公布号
JP3302323(B2)
申请公布日期
2002.07.15
申请号
JP19980111257
申请日期
1998.04.22
申请人
发明人
分类号
G11C11/417;A01N25/26;H01L21/8244;H01L27/11;(IPC1-7):G11C11/417;H01L21/824
主分类号
G11C11/417
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