| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a function trimming method which restrains over-trimming and can realize high precision even if a hybrid IC contains a high frequency circuit, in function trimming method of a hybrid IC containing a resistance element 1 for function trimming. SOLUTION: Trimming trenches 4 having a prescribed length are formed on a resistor 2 in a direction oblique or parallel to a current flowing direction in the resistance element 1, in such a manner that the trimming trenches 3 are adjacent to the widthwise direction of the trenches in order, and constituent material of a resistor is not left practically between the adjacent trimming trenches 3. A characteristic value of a hybrid IC is measured properly during formation of the trimming trenches, and the formation of the trimming trenches is continued as far as the characteristic value becomes a target characteristic value. The timing of measurement is desirable after the trimming trench 3 having the prescribed length is formed and before a trimming trench 3 adjacent to the above trimming trench 3 is formed (an inflection point 4).</p> |
