| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a soft laser marking method and an apparatus thereof, which can mark without scattering molten silicon to deposit in a soft laser marking, even if the dot depth is great, and readily erase print, when a defective water is converted into a monitor product, etc. SOLUTION: The method of printing on a water surface by soft marking comprises irradiating the wafer with a laser beam from its downside, to conduct marking on the wafer surface.</p> |
