| 摘要 |
PURPOSE: To obtain the subject compound having a specific mother nucleus structure and t-butoxycarbonylmethyl ether side chains, having high compatibility with polymeric compounds, and useful as a dissolution inhibitor for positive resists. CONSTITUTION: The compound of formula I (R is alkyl; m is 0-4). The compound of formula I is preferably obtained e.g. by dissolving a bis(4- hydroxyphenylmethyl)methyl-4-hydroxybenzene of formula II, e.g. bis(4- hydroxy-2,5-dimethylphenyl)methyl-4-hydroxybenzene, in DMF and subsequently reacting the compound of formula II with t-butyl chloroacetate in the presence of potassium carbonate at 60-100 deg.C for 4-8hr, etc. |
