| 摘要 |
PURPOSE: To obtain an ultrasonic actuator which can endure long term driving under severe environment of high temperature or high humidity and can be manufactured with high yield at low cost while reducing the damping and enhancing the drive performance. CONSTITUTION: The ultrasonic actuator comprises a piezoelectric 212 being excited by a drive signal, a resilient body 211 bonded to the piezoelectric 212 and producing an ultrasonic vibration on the driving plane upon excitation, and a mover 202 coming into pressure contact with the driving plane of the resilient body 211 and driven thereby. The base metal 221 of the mover is an sintered alloy produced by injection molding and sintering metal powder. |
