| 摘要 |
PURPOSE: To form a pattern at a high speed and with high flexibility without using a mask. CONSTITUTION: Main discharge parts #1 and #2 in two sets are disposed in the direction of the optical axis inside an airtight vessel 10. High-voltage power supplies 18a-18d are charged selectively on cathodes 16a-16d formed by dividing the main discharge part #2 in a plurality, in accordance with an arbitrary pattern respectively, and discharge ignition is made to occur in each region according to the arbitrary pattern by this charging of a high voltage. As the result, laser oscillation is generated only in the regions of the main discharge parts #1 and #2 overlapping each other in the direction of the optical axis. These regions of the laser oscillation are in accord with the arbitrary pattern. |
