| 摘要 |
PURPOSE: To analyze a fine pattern defect and the constituent of a fine adhered foreign object by opening a hole at a tip lens facing the sample of a transmission-type optical system and passing a vaporized atom, molecule, or ion and leading it to an analyzing system. CONSTITUTION: Holes 231 and 232 with a lens light axis nearly as the center are opened at tip lenses 201 and 202 facing a sample 1 of a transmission-type optical system 2 with a large pupil diameter. When light is applied from a laser light source 3, beams are of donut shape by a pupil-conjugate filter 34, form an image on the pupil of an optical system 2 by lenses 35 and 21, do not hit against the side surface of the holes 231 and 232, cause a small spot close to a diffraction limitation determined by the numerical aperture of the optical system 2 to be formed on the surface of the sample 1, and allow an object on the surface of the ionized sample 1 to be guided to a flight-time-type mass analyzer 8 through the holes 231 and 232. As a result, the transmission-type optical system 2 with a large numerical aperture can be arranged nearly vertically to the sample 1, thus applying light with a smaller spot size and selectively vaporizing a fine region. |
