| 摘要 |
<p>PURPOSE: To obtain a vacuum suction apparatus by which a sample can be corrected with high flatness without being influenced by dust particles or the like even at the outer circumference of the sample. CONSTITUTION: A vacuum suction part 3 and a seal part which surrounds it are formed on the surface of a vacuum suction device 1. Protruding pieces 2, 11 are formed respectively so as to be flush at the vacuum suction part 3 and the seal part, and a sample 6 is borne by the protruding pieces. A very small gap 12 formed between the seal part and the sample 6 acts as a large resistance in a vacuum evacuation operation so as to prevent the outside air from being sucked. In addition, the gap acts to prevent a working liquid from creeping in a working operation.</p> |
