| 摘要 |
PURPOSE: To remove the charge-up of a sample without limiting the primary function of an electron microscope. CONSTITUTION: The beam current value I1 of the electron beam radiated to a sample 7 and the current value I2 of the electron beam transmitting the sample 7 are detected, and the charge-up of the sample 7 is judged based on the detected current values I1 , I2 . When the sample is judged to have charge-up, the accelerating voltage Vo of a simplified electron gun 22 is obtained in response to the secondary electron emission ratioδ, the accelerating voltage Vo is applied to the filament 23 of the simplified electron gun 22, an electron beam is applied to the sample 7, and the charge-up of the sample 7 is removed.
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