| 摘要 |
A leakage measuring apparatus for detecting a minute amount of leakage of a sealing valve in a short time with high sensitivity, provided with a first pressure supply device for applying the same pressure to a first fluidic circuit and a test connection port to be connected with a sealing valve under leakage measurement, and to a second fluidic circuit serving as the reference and a reference connection port. First and second electromagnetic valves cut off the communication of the fluidic circuits to the first pressure supply device while the first and second fluidic circuits are under the applied pressure. A pressure sensor detects the pressure of the first fluidic circuit. A second pressure supply device supplies fluid to the first fluidic circuit and the same amount of fluid to the second fluidic circuit in order to maintain the pressure in the first fluidic circuit at the applied pressure on the basis of the detected pressure of the pressure sensor. A differential pressure sensor senses a differential pressure between the fluid pressures of the two fluidic circuits, thereby measuring the amount of leakage from the sealing valve quickly and accurately on the basis of the detected differential pressure.
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