| 摘要 |
PURPOSE: To obtain the subject compound having a specific mother nucleus structure and t-butoxycarbonylmethyl ether side chains, having high compatibility with polymeric compounds, and useful as a dissolution inhibitor for positive resists. CONSTITUTION: The compound of formula I (R is alkyl; n is 0, 1; m is 0 to 4-n), e.g. 2,6-bis[(2-t-butoxycarbonylmethyloxy-5-methylphenyl)methyl]-1-t- butoxycarbonylmethyloxy-4--methylbenzene. The compound of formula I is preferably obtained e.g. by dissolving a 2,6-bis(2-hydroxyphenylmethyl)-1- hydroxy-4-methylbenzene of formula II, e.g. 2,6-bis[(2-hydroxy-5-methylphenyl) methyl-1-hydroxy-4-methylbenzene, in DMF and subsequently reacting the compound of formula II with tbutyl chloroacetate in the presence of potassium carbonate at 60-100 deg.C for 4-8hr, etc. |
