| 摘要 |
PURPOSE: To make highly accurate alignment possible by averaging all of the quantities of deviations by each alignment mark by every area, obtaining the quantity of deviation of each area, and thereby obtaining the quantity of deviation of an object based on the quantities of deviations of all of the areas. CONSTITUTION: The effective quantities of pattern deviationsΔx1 andΔy1 are averaged, and average quantities of deviationsΔx1 andΔy1 at each corner are thereby obtained. Next, average quantities of deviationsΔx2 andΔy2 at four corners are furthermore averaged, and the quantities of deviationsΔx3 andΔy3 of the whole of an object at its center of gravity are thereby computed. Furthermore, the quantity of rotational movementΔθof the whole of an object is computed based on the average quantities of movements at four corners, so that the correction quantities of movementsΔx3,Δy3 andΔz3 of an object are thereby obtained. Subsequently, the object is moved in a X Y Z andθstage by each quantity of deviationΔx3,Δy3 of the whole of the object based on the correction quantities of movements for the center of gravity, and furthermore the object is rotated by the quantity of rotational movementΔθof the object, so that the object is thereby aligned at a position as close as possible to a regular designed position.
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