| 摘要 |
<p>PURPOSE: To obtain a vacuum suction apparatus which is durable for continuous and repeated use and can hold an especially thin sample without being deformed. CONSTITUTION: A pin 11 is fitted and inserted into a vacuum suction hole 3 in a vacuum-pin pad 2. The pin 11 integrally comprises a head part 12 and a leg part 13, and a vacuum-sealing member 5 is fixed to the surface 8 of the vacuum-pin pad 2 by means of the head part 12. The pin 11 comprises a vacuum-suction through hole 14 which is opened on the surface and the rear surface and which communicates with the vacuum suction hole 3. Thereby, when the vacuum suction hole 3 is evacuated, the vacuum sealing member 5 is brought into close contact with the rear of a sample 4, and the sample 4 can be sucked and held.</p> |
