| 摘要 |
PURPOSE: To enable securing of safety in a chamber by arranging a bypass circuit for linking the upstream side of an earth leakage breaker and an ozone decomposition system to operate the ozone decomposition system forcibly through the bypass circuit during the operation of the earth leakage breaker. CONSTITUTION: A relay 101 is connected at a position on the downstream side from an earth leakage breaker 5 of buses 1 and 2 and on the upstream side from an ozone fumigation system, a make contact 103 connected between the connection position of the ozone fumigation system and the connection position of an ozone decomposition system to close with the action of the relay 101, branch lines (bypass circuits) 107 and 108 between the upstream side from the earth leakage breaker 5 of the buses 1 and 2 and the decomposition system and a break contact 105 to the branch lines 107 and 108 to open with the action of the relay 101. The make contact 103 is opened with the action of the relay 101 during an electric leakage and the buses 1 and 2 are cut off between the ozone fumigation system and the ozone decomposition system of the buses 1 and 2 while the break contact 105 is closed to conduct the branch lines 107 and 108 for supplying a power source voltage to the ozone decomposition system. |
