| 摘要 |
PURPOSE: To enable miniaturization of a device and reduction of an impression voltage by improving the electromechanical conversion efficiency of a piezoelec tric ceramic element and further to improve the durability of the element by preventing cracking thereof even under the working condition wherein it is repeatedly loaded. CONSTITUTION: In a piezoelectric ceramic element wherein displacement is made to occur by impression of a voltage, a film constituted of conductive particles of which the average particle size is 0.1μm or below is formed on the surface of a piezoelectric ceramic material 1 and made an electrode layer 2 for impression of the voltage. Since the particles penetrate into spots in the surface of the piezoelectric ceramic material 1 left after crystal grains fall off or into pores existing in grain boundaries, parts not being brought into electric contact can be eliminated and a high electromechanical conversion efficiency is obtained. By providing a buffer layer 3 constituted of relatively rough particles on the electrode layer 2, besides, a stress applied to the element can be relaxed and, therefore, durability is improved.
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