发明名称 SHORT-ARC TYPE CADMIUM RARE GAS DISCHARGE LAMP
摘要 PURPOSE: To provide a short-arc type cadmium rare gas discharge lamp capable of obtaining a high output of the spectrum at the prescribed wavelength by cadmium ions and suitable for use in a high-resolution optical microscope by setting the ratio between the discharging current and the cadmium pressure to a prescribed value at the time of stationary lighting. CONSTITUTION: A nearly elliptically spherical luminous space enclosure section 11 is provided at the center of a light emitting tube 1 made of quartz, and sealed tube sections 12, 13 are formed at both ends of the enclosure section 11. A cathode 2 and an anode 3 are arranged near to each other in the enclosure section 11, and metal cadmium and one or two or more kinds of rare gases selected from krypton, xenon, argon, and neon are sealed in it. The metal cadmium is sealed so that the pressure is set to the range of 2-13.7kPa at the time of stationary lighting. When the ratio between the discharging current and the cadmium pressure is set to the ratio of 1.4-75 at the time of stationary lighting, the integrated value of the spectrum at the wavelength of 214±2nm is sufficiently increased, and the resolution of a high-resolution optical microscope can be improved.
申请公布号 JPH08195186(A) 申请公布日期 1996.07.30
申请号 JP19950024461 申请日期 1995.01.20
申请人 USHIO INC 发明人 YAMAGUCHI AKIYASU;YASUDA YUKIO;MATSUNO HIROMITSU;IGARASHI RYUSHI
分类号 G02B21/16;G03F7/20;H01J61/16;H01J61/18;H01J61/35;H01J61/52;H01J61/86;(IPC1-7):H01J61/16 主分类号 G02B21/16
代理机构 代理人
主权项
地址