| 摘要 |
PURPOSE: To improve the accuracy of a vibration-type gyroscope for detecting angular velocities. CONSTITUTION: The gyroscope is constituted of a vibrating plate 12 of a single crystal and a substrate 11. The vibrating plate 12 is laminated on the substrate 11. Elastic arms 14a, 14b, 14c of the vibrating plate 12 are deformed/vibrated in ±x directions by the piezoelectric effect. When the gyroscope is set in a rotary system, each elastic arm is vibrated in a (y) direction by the Coriolis force and a distance 16 between the elastic arms 14a, 14b, 14c and the substrate 11 is changed. Electrodes 18a, 18b are set at the elastic arms 14a-14c and the substrate 11. When a constant voltage is impressed by tone electrodes, the deformation of the elastic arms 14a-14c in the (y) direction can be detected from the electrodes 18a, 18b. A rotary angular velocity can be detected based on the detected value. Since a driving means and a detecting means utilize different physical effects, no influences of a driving power are brought about in the detected output, so that the angular velocity can be detected highly accurately. |
