发明名称 Molecular beam epitaxy effusion cell
摘要 A temperature controlled source cell for use in the practice of thin film depositions by molecular beam epitaxy is described which includes an optical sensor for monitoring source temperature, the sensor including a light pipe having one end near the source and the other end coupled to a fiber optic probe which carries light from the light pipe to a remote optical detector.
申请公布号 US5540780(A) 申请公布日期 1996.07.30
申请号 US19950494114 申请日期 1995.06.23
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE 发明人 HAAS, TRICE W.;EYINK, KURT G.
分类号 C23C14/24;C23C14/54;C30B23/02;C30B23/06;(IPC1-7):C23C16/00 主分类号 C23C14/24
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