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经营范围
发明名称
MEASURING APPARATUS OF VERY SMALL CURRENT
摘要
申请公布号
JPH08195420(A)
申请公布日期
1996.07.30
申请号
JP19950005907
申请日期
1995.01.18
申请人
SONY CORP
发明人
MATSUI MASATO
分类号
G01R1/073;G01R31/02;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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