| 摘要 |
PURPOSE: To detect a different part of two patterns without using a large-scale hardware and consuming a long time by vibrating-and-comparing patterns for every local area. CONSTITUTION: Binary image data of a pattern to be inspected are stored as an object data and a master data (S10, S12). Based on the data, a master pattern is first moved to a position where the master pattern nearly overlaps with the object pattern. The moving amount is stored as a master moving amount (S14). Then, data of each inspection block are sequentially extracted from the object data (S16). The master pattern is moved by the master moving amount for every extraction. The blocks are vibrated-and-compared in a predetermined range of the moved master pattern centering a position corresponding to the current inspection block (S18-S26). When the blocks are detected by the comparison to agree with each other, the master moving amount is updated based on an agreeing position (S30). If the blocks are detected to be different, the vibration-and-comparison is carried out for the next inspection block without updating the master moving amount (S36, S16-S26). |
