发明名称 Bicmos process that supports merged devices
摘要 A merged BiCMOS device 10 having a bipolar transistor 60 and a PMOS transistor 64 formed in the same well region 18a. Bipolar transistor 60 is comprised of an emitter electrode 30, base region 26, and collector region formed by well region 18b. Emitter electrode 30 is separated from base region 26 by thick oxide 24. PMOS transistor 64 comprises source/drain regions 52 and 52a, gate electrode 40, and gate oxide 36. PMOS transistor 64 may also comprises LDD regions 44. Source/drain region 52a is in contact with base region 26. If desired, the emitter electrode 30 and gate electrode 40 may be silicided.
申请公布号 US5541134(A) 申请公布日期 1996.07.30
申请号 US19940234194 申请日期 1994.04.28
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 EKLUND, ROBERT H.
分类号 H01L21/336;H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/732;H01L29/78;(IPC1-7):H01L21/824 主分类号 H01L21/336
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