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发明名称
SOI SUBSTRATE, AND ITS MANUFACTURE
摘要
申请公布号
JPH08195483(A)
申请公布日期
1996.07.30
申请号
JP19950006291
申请日期
1995.01.19
申请人
HITACHI LTD
发明人
TAMAOKI YOICHI;IKEDA TAKAHIDE
分类号
H01L27/12;H01L21/02;(IPC1-7):H01L27/12
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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