APPARATUS FOR PRODUCING COLOR SAMPLE

摘要

PURPOSE: To make it possible to make defect inspection by dealing with differences, if any, in the sizes of objects to be inspected according to products without producing the many defective articles by canon defects and to prevent the occurrence of defective by surely detecting the defects of different kinds. CONSTITUTION: This apparatus for producing color samples successively produces light shielding patterns on substrates and respective colored pixel patterns of red, green and blue on an integral line on a substrate by a film forming stage and film exposing and developing stages. The apparatus is provided with an inspecting apparatus for inspecting the defects after the formation of the respective patterns, a rejector for discharging the substrates from the line when the defects are detected and a mask changer for exchanging the exposure mask of an exposure section when the detected defects are the common defects. Two units of adjustable cameras are used for the inspection apparatus so that the apparatus deals with the changes in the sizes of the objects to be inspected. The light source of the inspection apparatus is provided with an optical filter or a spectral light source is used for the light source itself.