| 摘要 |
<p>A flow regulator/restrictor placed in a fluid path to passively compensate for variations in fluid pressure by deflection or movement. In one embodiment a silicon micromachined housing has a damper beam cantilevered to the interior wall between inlet and outlet. Deflections of the beam vary the volume of the restrictive gap formed between the damper beam and the interanl wall of the housing adjacent the outlet. In another embodiment the damper element is a floating element in the housing and has conformal side walls with the interior of the housing. The restrictor elements may be stacked to provide a stepped pressure drop, restrictor system.</p> |
