发明名称 |
MULTIPLE INTERFACE DOOR FOR WAFER STORAGE AND HANDLING CONTAINER |
摘要 |
The present invention is an improved container and interface for transporting or otherwise handling contamination-sensitive materials, such as semi-conductor wafers during processing. The container of the present invention employs a door-within-a-door design, allowing the container to connect with different interfaces on a single side. Employing a container of the present invention, manufactures may connect a single container to different tools or mini-environments employing incompatible interfaces without the need to use different containers or to access the contents of a single container from different directions. The present invention is particularly useful in instances where a single interface standard, e.g., SEMI Standard SMIF interfaces, has not been uniformly adopted in a facility. The present invention also provides means which allow either a cassette container or a cassette to be directly placed on an indexer and subsequent indexing to the correct location. This is also useful in instances where a facility has not uniformly adopted SMIF technology, and requires the flexibility to load both cassettes and SMIF containers on the same tool.
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申请公布号 |
WO9622609(A1) |
申请公布日期 |
1996.07.25 |
申请号 |
WO1995US04685 |
申请日期 |
1995.04.17 |
申请人 |
W.L. GORE & ASSOCIATES, INC. |
发明人 |
MCKENNA, DOUGLAS, B.;BRINER, DONALD, R.;LARAMORE, CHRISTOPHER, D. |
分类号 |
B65G49/07;H01L21/673;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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