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发明名称
ELECTRICAL CHARACTERISTIC MEASURING APPARATUS
摘要
申请公布号
KR960010066(B1)
申请公布日期
1996.07.25
申请号
KR19880007244
申请日期
1988.06.16
申请人
TOKYO ELECTRON K.K.
发明人
HAYAKAWA, YUJI;UCHIDA, TAKUO
分类号
G01R31/28;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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