Material removal from workpieces by laser radiation
摘要
<p>The process concerns material removal from workpieces by means of pulsed ultraviolet laser radiation with energy densities above a material-specific and process-specific removal threshold. The surface of the workpiece is covered with a liq. film.</p>
申请公布号
DE19501279(A1)
申请公布日期
1996.07.25
申请号
DE1995101279
申请日期
1995.01.18
申请人
BLZ BAYERISCHES LASERZENTRUM GEMEINNUETZIGE FORSCHUNGSGESELLSCHAFT MBH, 91058 ERLANGEN, DE
发明人
BECKER, WOLFGANG, 91052 ERLANGEN, DE;REBHAN, THOMAS, 82024 MUENCHEN, DE