A disc-handling apparatus for supporting a magnetic disc during material deposition and for transporting the disc into and out of a deposition station is described. The apparatus has a holder that supports a disc at three contact points by a support and a pair of arms, such that the disc is positively gripped by at least three contact points.
申请公布号
WO9622405(A1)
申请公布日期
1996.07.25
申请号
WO1996US00637
申请日期
1996.01.16
申请人
HMT TECHNOLOGY CORPORATION;NGUYEN, HOANG;HARPER, BRUCE, M.
