| 发明名称 |
METHOD OF MANUFACTURING MARK FOR MEASUREMENT |
| 摘要 |
The method of manufacturing a measuring mark to measure the accuracy of pattern overlapping includes forming a calibration measuring vernier (4) at the upper, down, left and right side of a measuring mark (5) of box in box structure which measures the accuracy of pattern overlapping.
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| 申请公布号 |
KR960010027(B1) |
申请公布日期 |
1996.07.25 |
| 申请号 |
KR19920025404 |
申请日期 |
1992.12.24 |
| 申请人 |
HYUNDAI ELECTRONICS IND. CO., LTD. |
发明人 |
MOON, SEUNG - CHAN |
| 分类号 |
G03F9/00;(IPC1-7):G03F9/00 |
主分类号 |
G03F9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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