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发明名称
Freitragender Ausleger für Atomkraftmikroskop und Verfahren zu dessen Herstellung
摘要
申请公布号
DE69208979(T2)
申请公布日期
1996.07.25
申请号
DE1992608979T
申请日期
1992.07.14
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP
发明人
KADO, HIROYUKI, OSAKA-SHI, OSAKA-FU 532, JP;TOHDA, TAKAO, IKOMA-SHI, NARA-KEN 630-02, JP
分类号
G01Q70/10;G01B5/28;G01B7/34;G01B21/30;(IPC1-7):G01B7/34
主分类号
G01Q70/10
代理机构
代理人
主权项
地址
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