| 发明名称 |
Liquid precursor for cubic-phase passivating/buffer film |
| 摘要 |
A chemical composition consists essentially ((t-amyl)GaS)4. The chemical composition can be employed as a liquid precursor for metal organic chemical vapor deposition to thereby form a cubic-phase passivating/buffer film, such as gallium sulphide. |
| 申请公布号 |
AU4695396(A) |
申请公布日期 |
1996.07.24 |
| 申请号 |
AU19960046953 |
申请日期 |
1996.01.05 |
| 申请人 |
PRESIDENT AND FELLOWS OF HARVARD COLLEGE;GALIA, INC |
发明人 |
ANDREW R BARRON;MICHAEL B POWER;ANDREW N MACINNES |
| 分类号 |
C07F5/00;C07F5/06;C23C16/30;H01L21/314 |
主分类号 |
C07F5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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