| 摘要 |
A test chamber unit for testing a semiconductor device is provided to simplify a test process by transferring test trays to a test unit without performing a sorting process. A plurality of test trays including semiconductor devices are loaded vertically into test tray loading units(11,21). A plurality of first chambers(13,23) are used for heating or cooling the semiconductor devices and performing a test process by connecting electrically the semiconductor devices with the test socket of the test head. A plurality of second chambers(14,24) are used for cooling or heating the semiconductor devices. The test trays are loaded vertically into a plurality of test tray unloading units(12,22).
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