THIN FILM ELECTRONIC TYPE IMAGE FORMING DEVICE AND METHOD OFREPAIRING FLAW OF THIN FILM ELECTRONIC TYPE IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain an electronic thin film imaging device having a repaired area where the electric leakage is low enough not to have adverse effect on the noise characteristics of the device. SOLUTION: The electronic thin film imaging device 100 has a repairing area sandwiched between an upper conductive layer 120 and an underlying component 140 wherein the upper conductive layer 120 is electrically isolated from the underlying component 140 by removing the upper conductive layer 120 and a dielectric layer 130 partially. The repaired area includes a bottom level having a surface made of the material of the component 140, and an intermediate step level having a surface made of the material of the dielectric layer. The intermediate step level has lateral dimensions larger than those of the bottom level and the width on the surface of the intermediate step level is set in the range of 1-3μm. The structure at the repaired area is formed by removing the material through laser etching and withdrawing the conductive layer 120 from the side wall of dielectric material in the area from where a defect is removed.