| 摘要 |
PURPOSE: To provide a specimen conveying method in a vacuum treatment equipment wherein foreing matter is prevented from attaching to the specimen surface to be treated, by performing carriage and treatment while turning the specimen surface to be treated downward. CONSTITUTION: When a specimen surface to be treated is turned downward, dipole electrodes having anodes and cathodes are used for revolution arms 3, 4 and stages 5, 6, 7, and electrostatically attracted to the specimen surface to be treated to perform carriage and treatment. By detecting the voltage drop of electrodes as the electrostatic attraction part for retaining specimens 1, 2, the positions of the specimens 1, 2 are detected. Protective stage is installed below each waiting position, and protects a specimen when it drops. When it is detected by a transmission sensor that there is a specimen on the protective stage, the specimen is delivered on the protective stage. Thereby carriage and treatment are performed in the state that the specimen surface to be treated is turned downward. |
