| 摘要 |
PURPOSE: To obtain a CVD-SiC molded product prevented from the generation of cracks and warpage, and further to provide a method for producing the same. CONSTITUTION: A SiC molded product by the CVD method, wherein SiC films are formed on both the sides of an SiC substrate formed by the CVD method. The method for producing the SiC molded product comprises forming a SiC film on the surface of the substrate by the CVD method, removing the substrate, and further forming the SiC films on both the sides of the obtained SiC substrate. |
