发明名称 |
Scanning probe microscope having a cantilever used therein |
摘要 |
A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.
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申请公布号 |
US5537863(A) |
申请公布日期 |
1996.07.23 |
申请号 |
US19940276021 |
申请日期 |
1994.07.15 |
申请人 |
NIKON CORPORATION |
发明人 |
FUJIU, TAKAMITSU;WATANABE, SHUNJI;NOMURA, TATSUSHI;FUJII, TORU;SANGO, YOSHINORI |
分类号 |
B81B3/00;G01B21/30;G01Q20/04;G01Q60/38;H01L41/09;(IPC1-7):G01B5/28 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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