发明名称 OXYGEN DETECTOR AND DETECTING METHOD OF DIFFUSION DEVICE
摘要 An oxygen detector of a diffusion apparatus and an oxygen detecting method using the same are provided to detect doubly safely the concentration of oxygen by adding a pressure detecting sensor to a conventional oxygen detecting sensor. An oxygen detector of a diffusion apparatus(10) includes an oxygen detecting sensor, a pressure detecting sensor, a control unit, and a display unit. The oxygen detecting sensor(20) includes an oxygen detecting part(14) and an oxygen display part(11). The pressure detecting sensor(30) includes a pressure detecting part(31) and a pressure display part(32). The control unit(40) compares values measured from the oxygen detecting sensor and the pressure detecting sensor with a reference value. The display unit displays an abnormal state of the diffusion apparatus by the order of the control unit.
申请公布号 KR20070028194(A) 申请公布日期 2007.03.12
申请号 KR20050083443 申请日期 2005.09.07
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 HAN, SUNG SUK
分类号 H01L21/02;H01L21/30 主分类号 H01L21/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利