发明名称 Flexible electronics using ion implantation to adhere polymer substrate to single crystal silicon substrate
摘要 An electronic apparatus uses a single crystalline silicon substrate disposed adjacent to a flexible substrate. The electronic apparatus may be a flexible flat panel display, or a flexible printed circuit board. The flexible substrate can be made from polymer, plastic, paper, flexible glass, and stainless steel. The flexible substrate is bonded to the single crystalline substrate using an ion implantation process. The ion implantation process involves the use of a noble gas such as hydrogen, helium, xenon, and krypton. A plurality of semiconductor devices are formed on the single crystalline silicon substrate. The semiconductor devices may be thin film transistors for the flat panel display, or active and passive components for the electronic device.
申请公布号 US2007085953(A1) 申请公布日期 2007.04.19
申请号 US20040579051 申请日期 2004.11.17
申请人 ARIZONA BOARD OF REGENTS ACTING FOR AND ON BEHALFOF ARIZONA STATE UNIVERSITY 发明人 ALFORD TERRY L.;THOMPSON JR DOUGLAS C.;KIM HYUNCHUL;NASTASI MICHAEL A.;MAYER JAMES W.;ADAMS DANIEL
分类号 G02F1/1337;H01L;H01L21/265;H01L21/44;H01L21/77;H01L29/786 主分类号 G02F1/1337
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