| 摘要 |
<p>PURPOSE: To provide vacuum flanges and a metallic gasket by which a capture ring to the gasket effectively functions and which have excellent sealing characteristics even if a clearance exists between a flange wall and a gasket outer peripheral surface. CONSTITUTION: A metallic gasket 2 is sandwiched between a pair of vacuum flanges 1 having the knife edge, and is fastened by a bolt 3. An inclination is arranged on flange walls 5, and an angle-shaped inclination is arranged on an outer peripheral surface 7 of the metallic gasket 2.</p> |
