| 摘要 |
PURPOSE: To remove mist and residual moisture by improving the structure of a chamber and enhance an atomosphere in the chamber. CONSTITUTION: A spin dryer has a rotor 5 giving a circular motion at high speed to an object 11 to be dried to remove moisture present on the surface of the object 11 by a centrifugal force, a chamber 4 in which the rotor 5 shielded from the external space conducts a circular motion at high speed, and an air feed/exhaust apparatus 15 for feeding and exhausting atmospheric air in the chamber 4. A wall face 2 of the chamber 4, on which moisture removed by the centrifugal force scatters, is inclined so as to satisfy the following two conditions: the one is 30 deg.<=θ1 <=85 deg. wherein an angle made by the wall face 2 of the chamber, on which moisture removed by the centrifugal force generated by the revolution of the rotor 5 scatters, and the direction of the centrifugal force is denoted byθ1 , and the other is 50%<=R<=90% wherein R represents a ratio of an area S1 projected perpendicularly onto a virtual wall face 3 of the chamber wall face 2 assuming the angleθ1 satisfying the above condition to an area S2 of a virtual wall face when an angle of the chamber wall face, on which moisture scatters, is made toθ1 =90 deg..
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