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发明名称
Method of manufacturing semiconductor device
摘要
申请公布号
EP0437371(B1)
申请公布日期
1996.07.24
申请号
EP19910300193
申请日期
1991.01.11
申请人
NEC CORPORATION
发明人
NAKANO, EIICHI
分类号
H01L21/3213;H01L21/768;(IPC1-7):H01L21/768;H01L21/321
主分类号
H01L21/3213
代理机构
代理人
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