| 摘要 |
PURPOSE: To provide an inexpensive and compact optical scanner capable of executing a highly resolving and precise scanning without complicating constitution of an optical system. CONSTITUTION: This scanner is constituted of a variable mirror 5 irradiated with laser beam emitted from a laser beam source 1 through a collimate lens 2 and a cylindrical lens 4, and having a reflection surface formed deformably, a polygon mirror 5 reflecting and deflecting the laser light reflected on the variable mirror 3, fθlenses 6a, 6n setting the laser light deflected by the polygon mirror 5 in a prescribed size and shape and converging it on a scan surface 7 and a wave front shape detector 8 detecting the deformation of the wave front shape of light to be reflected on the variable mirror 3. |
