| 摘要 |
PURPOSE: To prevent an arc discharge from occurring between main electrodes in a gas laser device when the laser device is made to output laser rays of high power by enhancing it in discharge repetition frequency. CONSTITUTION: A gas laser device is equipped with a hermetically sealed vessel 11 filled with gas laser medium, a blower 12 which circulates gas laser medium in a prescribed direction, a pair of main electrodes 14a and 14b which are provided separate from each other in a direction vertical to the direction of laser medium circulation and where a main discharge takes place to excite laser medium located in a space between the main electrodes 14a and 14b, and a heat exchanger 15 which serves as a flow rate control means that makes gas laser medium almost equal in flow rate distribution in the space along a direction in which the electrodes are separate from each other. |
