| 摘要 |
PURPOSE: To provide a method of manufacturing a photovoltaic device, wherein the films of the device are not flawed and an energy beam is uniformly focused. CONSTITUTION: When an ITO film 4 as a back electrode is irradiated with an energy beam for the formation of an open groove 41, a photovoltaic device is fixed to a tray, with the face of a glass board 1 downwards, and the ITO film 4 is irradiated with an energy beam from above. The ITO film 4 is made of sublimatable material, so that the open groove 41 is finely formed. The supporting surface of the tray is not brought into contact with films, so that the films are not flawed. |
