发明名称 |
Vacuum coating apparatus |
摘要 |
A closed cylindrical housing defining a transport chamber has a top plate with a first opening communicating with an entry and exit chamber, and a second opening communicating with a coating chamber. A turntable rotatable about an axis in the transport chamber carries a holder to a first position below the first opening as it carries a like holder to a second position below the second opening. Each holder has thereon a container with a diameter smaller than the first opening but larger than the second opening. A first lifter raises a holder sealingly against the top plate around the first opening, the container thereon passing through the first opening to load or unload substrates. A second lifter raises the other holder so that the container thereon abuts a mask defining the second opening in order to coat a substrate in the container.
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申请公布号 |
US5538560(A) |
申请公布日期 |
1996.07.23 |
申请号 |
US19940280310 |
申请日期 |
1994.07.26 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
ZEJDA, JAROSLAV;HENRICH, J+E,UML U+EE RGEN |
分类号 |
C23C14/50;C23C14/56;(IPC1-7):C23C16/00;B05C13/02;B23Q1/25;C23C14/00 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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